The electrostatic chuck controller is a bipolar power supply, designed as a core power control device for precision processes in semiconductors, panels, and photovoltaics.
It supports high-precision voltage regulation and real-time monitoring of critical parameters such as voltage, current, and capacitance. With millisecond-level clamping response speed, it ensures rapid positioning and release of wafers in manufacturing, etching, coating, and inspection processes.
The controller includes interfaces for communication with upper-level systems, enabling remote control of functions and real-time monitoring of operational status via command instructions.
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ESCC 510 |
ESCC 620 |
| Input voltage | 100~264 V AC/47~63Hz | 24 V DC |
| Input current | 0.2 A | 2 A |
| Output clamping voltage | A: 0~±500 V | A: 0~±2000 V |
| B: 0~±500 V（Phase B =[-1] x Phase A) | B: 0~±2000 V（Phase B =[-1] x Phase A) | |
| Output clamping voltage accuracy | ＜2%F.S. | ＜0.5%F.S. |
| Output grounding voltage | 1000~4000 V | N.A. |
| Output grounding voltage accuracy | ＜5%FS | N.A. |
| Operating current | 0 ~±15 mA DC | 0 ~±7.5 mA DC |
| Peak current | 20 mA | 10 mA |
| Communication interface | RS-485 | RS-485 |
| Communication protocol | Modbus (RTU) | Modbus (RTU/ASCII)/customizable |
| Remote control interface | N.A. | DB15 |
| Environment | Operating：0 ℃~45 ℃；25~60% HR | |
| Storage：-35 ℃~85 ℃；25~60% HR | ||
| Dimensions | 482.6 mm×88.1 mm×361.8 mm（W×H×D) | |
