Key Parts - Shanghai YiNGUAN Semiconductor Technology Co., LTD

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Key Parts

High thermal conductivity, low coefficient of expansion
Ultra-flat capabilities
High stiffness, better wear resistance
Lightweight design
High purity, no metal ion pollution
Customized requirements accepted

Electrostatic Chuck

Electrostatic Chuck

Coulomb's Law or Gradient Force electrostatic chuck
Support Bi-polar, multi-polar electrode, interdigitated electrode design etc.
Suitable for UHV environments up to 10^-5 Pa
High clamping force
Typical global flatness: 5μm PV (D = 300 mm)
Flexible surface pattern design
Suitable for non-magnetic environment
Substrates include wafer, dielectric material such as sapphire, glass and more.

Electrostatic Chuck Controller

Electrostatic Chuck Controller

Provide two phase voltages of equal magnitude and opposite phase
Provide the penetration voltage for wafer use
Provide capacitance detection, for indicator of no-wafer, wafer-clamped, and release status
Provide penetration detection, for indicator of penetration status
LCD displayer, with the value of clamping and penetration voltage,resistance and capacitance detection

High-flex flat cable system

High-flex flat cable system

Bending life exceeds 10 million cycles.
A greater variety of cable types and flexible combination methods.
Higher integration with a smaller bending radius.
High cleanliness movement with no particles.
No minimum order quantity restrictions.

Dust-free POD Drag Chain

Dust-free POD Drag Chain

Highly durable outer layer with a resistance of millions of reciprocating cycles.
Cleanliness level of ISO Class 100, effectively protecting cables and reducing cable powder。
Wide range of application.
Customizable for different POD widths, meeting customer customization requirements.

Vacuum Optical Fiber Feedthrough Flange

Vacuum Optical Fiber Feedthrough Flange

Feedthroughs are available with standard（CF, KF, ISO,etc.） or custom flanges.
Optical fibers are sealed with feedthroughs using adhesive, featuring no breakpoints in the fiber to ensure the optimal optical performance.
Compatible with SM, MM, PM fibers and other fiber types.
Available in single-pass or multi-pass configurations.
The material in the cavity is suitable for vacuum conditions, and the fiber sheath material can be stainless steel 304 and PTFE.
Suitable for UHV environments up to 10^-5Pa.

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