The stage adopts ultra-thin profile, can realize the horizontal high precision, high stiffness linear motion.
|
Item |
AXY110 |
|
Active axes |
X,Y |
|
Travel range |
160mm（upper axis）；180mm（lower axis） |
|
Max. velocity |
upper shaft：0.7m/s lower shaft：0.8m/s |
|
Max. acceleration |
upper shaft：0.7g lower shaft：2g |
|
Sensor resolution |
5nm |
|
Bidirectional repeatability |
±0.1µm（upper axis）；±0.1µm（lower axis） |
|
Accuracy_calibration value |
±0.2µm（upper axis）；±0.2µm（lower axis） |
|
Straightness |
±0.5µm（upper axis）；±0.5m（lower axis） |
|
Flatness |
±0.5µm（upper axis）；±0.5µm（lower axis） |
|
Pitch |
25µrad（upper axis）；25µrad（lower axis） |
|
Yaw |
10µrad（upper axis）；10µrad（lower axis） |
|
Max. load |
4.5kg |
|
Peak force |
85N |
|
Continuous force |
39N |
|
Moving mass |
upper shaft: 2.8kg lower shaft: 10kg |
|
Total mass |
28.5kg |
|
Dimensions |
559mmX459mmX109mm |
