Air-Bearing Stage - Shanghai YiNGUAN Semiconductor Technology Co., LTD

EN 中文

HOME

PRODUCTS

Precision Motion Systems

Specialty Motors

APPLICATIONS

CONTACT

产品中心

Air-Bearing Stage

Precision Motion Systems: Vacuum Stage; Air-Bearing Stage; Single-Axis Stage; XY Stage; ZT Stage; Multi-Axis Stage

Specialty Motors: Voice Coil Motor; Maglev Voice Coil Motor; Water-Cooling Motor; Motor Module

Key Parts: Vacuum Chuck; Electrostatic Chuck&Controller; Dust-free Cable; Vacuum Optical Fiber Feedthrough Flange

Piezo Products

ARD120 Precision Air Bearing Rotary Stage – Sub‑arcsec Accuracy

ARD120 Precision Air Bearing Rotary Stage – Sub‑arcsec Accuracy

Single T-axis
Air-bearing design
Bidirectional repeatability: ±0.5 arcsec
Diameter: 120-220 mm
Hollow aperture: 10-50 mm
Max. load_Axial: 8-66 Kg
Max. load_Radial: 4-36 Kg
Rotation velocity up to 1000 rpm

PART100 Precision Air Bearing Rotary Stage – High Load & Accuracy

PART100 Precision Air Bearing Rotary Stage – High Load & Accuracy

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 100 mm
Hollow aperture: 25 mm
Max. load_Axial: 53 Kg
Max. load_Radial: 17 Kg
Rotation velocity up to 600 rpm@48V

LART150 Ultra‑Thin Air Bearing Rotary Stage – Ø75mm Hollow, ±1.5 arcsec

LART150 Ultra‑Thin Air Bearing Rotary Stage – Ø75mm Hollow, ±1.5 arcsec

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 150 mm
Hollow aperture: 75 mm
Max. load_Axial: 80 Kg
Max. load_Radial: 30 Kg
Rotation velocity up to 800rpm

AXY110 Air‑Bearing XY Stage – ±0.1µm Repeatability, 5nm Resolution

AXY110 Air‑Bearing XY Stage – ±0.1µm Repeatability, 5nm Resolution

X and Y axes
Travel range: 160mm（upper axis）；180mm（lower axis）
Bidirectional repeatability: ±0.1μm（upper axis）；±0.1μm（lower axis）
Max. load: 4.5 Kg

SITEMAP|LEGAL STATEMENT|CONTACT

© 2019-2026 Shanghai YiNGUAN Semiconductor Technology Co., LTD www.ygbdt.com All rights reserved　ICP备案：沪ICP备19035819号