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Vacuum Chuck

Precision Motion Systems
Vacuum Stage
Air-Bearing Stage
Single-Axis Stage
XY Stage
ZT Stage
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Specialty Motors
Voice Coil Motor
Maglev Voice Coil Motor
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Vacuum Chuck
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Piezo Products
SiC Vacuum Chuck – 0.5µm Flatness, High Thermal Conductivity
SiC Vacuum Chuck – 0.5µm Flatness, High Thermal Conductivity
  • High thermal conductivity, low coefficient of expansion 
  • Ultra-flat capabilities
  • High stiffness, better wear resistance
  • Lightweight design
  • High purity, no metal ion pollution
  • Customized requirements accepted
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