Multi-Axis Stage - Shanghai YiNGUAN Semiconductor Technology Co., LTD

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Multi-Axis Stage

GS200 Gimbals & Optical Mounts

GS200 Gimbals & Optical Mounts

360°infinition rotation in 2 axes with gimbal system
Accuracy: ±5 arcsec to ±40 arcsec
Max. load: 6.8-16 Kg
Hollow aperture: 95-206 mm
Rotation velocity up to 100rpm

PS150 Maglev Polar Stage

PS150 Maglev Polar Stage

X, Z, T axes
360° infinition rotation
X-axis travel: 155 mm
Vertical mechanical travel up to 30mm
Bidirectional repeatability: ±0.5μm (X-axis); ±0.2μm/1mm (Z-axis); ±2 arcsec (T-axis)
Maglev gravity compensation technology
Active air/water cooling design
Rotation velocity up to 150rpm

LST190 Stacked XYT Stage

LST190 Stacked XYT Stage

X, Y, T axes
360° infinition rotation
X and Y axis travel: 365 mm
Bidirectional repeatability: ±0.5μm (X, Y axis); ±2 arcsec (T axis)
Rotation velocity up to 150rpm

L3S190 Stacked XYZ Stage

L3S190 Stacked XYZ Stage

Stacked 3 - axis stage with orthogonality design
Global flatness and straightness up to sub - um level
X/Y axis: High stiffness, high precision guide; Consistent design of cable disturbing force
Z - axis: Vertical magnetic levitation gravity compensation for high positioning accuracy; High stiffness, high precision guide; Vertical incremental encoder for up to 5nm resolution; Ultra - thin, lightweight design; Vertical mechanical travel up to 30mm

L4S210 Stacked XYZT Stage

L4S210 Stacked XYZT Stage

Stacked 4 - axis stage with orthogonality design
Global flatness and straightness up to sub - um level
X/Y axis: High stiffness, high precision guide; Consistent design of cable disturbing force
Z - axis: Vertical magnetic levitation gravity compensation for high positioning accuracy; High stiffness, high precision guide; Vertical incremental encoder for up to 5nm resolution; Ultra - thin, Lightweight design; Vertical mechanical travel up to 30mm
T - axis: 360° rotation, no tubing wrapping, 12, 8 wafer applicable; Wafer warpage up to 0.7mm; Rotation velocity up to 150rpm

HS1000 METIS Multi-axis Motion System

HS1000 METIS Multi-axis Motion System

Integrated 5 - axis stage with orthogonality design
Flatness and straightness up to sub - um level
Hybrid application of mechanical guide and air - bearing guide
X/Y axis: High stiffness, high precision guide; Consistent design of aledistraing free; High - performance air - bearing guide for excellent dynamic flatness over the entire stroke
Z - axis: Vertical maglev gravity compensation for high positioning accuracy; High stiffness, high precision guide; Ultra - thin, lightweight and modularization design; Vertical mechanical travel up to 30mm
T - axis: 360° rotation, no tubing wrapping; 12, 8, 6' wafer applicable; Rotation velocity up to 150rpm

Z3T70 Multi-Axis Micropositioning Stage

Z3T70 Multi-Axis Micropositioning Stage

±0.1° Tip/Tiltprecision adjustment
High precision infinition rotation
Constant stiffness maglev gravity compensation technology
High positioning accuracy,excellent motion control capability,and outstanding stability

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