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XY Stage

Precision Motion Systems
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XY Stage
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Piezo Products
L2S125 Stacked XY Stage – ±0.4µm Repeatability, ±2nm Stability
L2S125 Stacked XY Stage – ±0.4µm Repeatability, ±2nm Stability
  • X and Y axes
  • Travel range: 365 mm * 365 mm & 410 mm * 475 mm
  • Bidirectional repeatability: ±0.4 μm
  • Max. load: 2 Kg & 6 Kg
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PL90 Integrated XY Stage – ±0.5µm Repeatability, 90mm Height
PL90 Integrated XY Stage – ±0.5µm Repeatability, 90mm Height
  • Non-contact direct-drive linear motor drive for high dynamic response
  • Optical linear encoder for high precision
  • High stiffness anti-creep cross roller guide
  • Excellent positioning accuracy and dynamic performance
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PLA90 XY Stage with Aperture – ±0.5µm Repeatability, 90mm Height
PLA90 XY Stage with Aperture – ±0.5µm Repeatability, 90mm Height
  • Non-contact direct-drive linear motor drive for high dynamic response
  • Optical linear encoder for high precision
  • High stiffness anti-creep cross roller guide
  • Excellent positioning accuracy and dynamic performance
  • Large hollow aperture
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