VLS200 High Vacuum Precision XY Stage
VLS200 High Vacuum Precision XY Stage
- Suitable for ultra-high vacuum environment up to 10-5Pa
- Vacuum linear motor drive for low outgassing rate, low heat generation
- Unique linear motor magnetic shielding design
- Optional non-magnetic materials, with overall magnetic leakage up to nT level.
- Excellent velocity and position stability
VIEW MORE>
