Electrostatic Chuck Controller
Electrostatic Chuck Controller
- High-precision clamping voltage output
- Millisecond-level clamping response speed
- Supports wafer status monitoring with configurable detection thresholds
- Flexible configuration of clamping/declamping voltage waveforms
- Real-time monitoring of critical parameters (voltage, current, capacitance)
- Optional internal environmental temperature detection ...
VIEW MORE>
