MZT90 Maglev ZT Stage – ±15nm Stability, 360° Rotation
MZT90 Maglev ZT Stage – ±15nm Stability, 360° Rotation
- Z and T axes
- 360°infinition rotation
- Vertical mechanical travel up to 30mm
- Bidirectional repeatability: ±0.3 μm/1 mm (Z-axis); ±2 arcsec (T-axis)
- Z-axis straightness: 2 μm
- Maglev gravity compensation technology
- Full closed-loop servo design
- 12', 8', and 6' wafer applicable
- Rotation velocity up to 150rpm
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